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Chapter 1 Introduction
1£®1 Preface
1£®1£®2 Surface Charge
1£®1£®4 Artifact Induced in The KPFM
1£®3 0utline

Chapter 2 Theory of Noncontact Atomic-Force Microscopy
2£®1 Preface
2£®2 Atomic-Force Microscopy
2£®2£®4 Principle of The Cantilever
2£®3 Applications of SPM in Micro Measurements/Nano
2£®3£®2 Microelectronics/Nanoelectronics
2£®3£®4 Manipulation and Spectroscopy

Chapter 3 Kelvin Probe Force Microscopy
3£®2 Amplitude Modulation and Frequency Modulation
3£®3 Minimum Detectable Contact Potential Difference in AM-and FM-KPFMs
3£®4 KPFM in Electrostatic Force Measurements
3£®5 Conclusion

Chapter 4 NC-AFM/KPFM Equipment
4£®1 Preface
4£®3£®2 Fiber and Sample Approach Stages
4£®3£®3 Tube Scanner
4£®3£®4 Cantilever and Sample Holders
4£®3£®5 Vibration Isolation System
4£®4£®1 0ptical Interference Theory
4£®4£®2 Interferometer Detection
4£®5 W-Sputteringlnstrument
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Chapter 5 Atomic Resolution on Cu(ll0)-0 Surface with NC-AFM
Chapter 6 Clarification of Stray Capacitance Effect with Heterodyne-AM KPFM(HAM-KPEM) at Atomic Resolution
Chapter 7 Phantom Force Elimination Using FM-KPFM without
Feedback at Atomic Resolution
Appendix ¢ñ
Appendix ¢ò