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Chapter 1 Semiconductors Physics
1£®1 Energy Bands and Carrier Concentration
1£®2 Carrier Transport Phenomena
1£®3 PN Junction
1£®4 Summary
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Chapter 2 Semiconductor Device
2£®1 Bipolar Junction Transistor
2£®2 The MOSFET
2£®3 Microwave and Photonic Devices
2£®4 Summary
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Chapter 3 Processing Technology
3£®1 Crystal Growth and Epitaxy
3£®2 Crystal Growth from the Melt
3£®3 Vapor-Phase Epitaxy
3£®4 Oxidation and Film Deposition
3£®5 Diffusion and Ion Implantation
3£®6 Lithographies
3£®7 Wet Chemical Etching
3£®8 Dry Etching
3£®9 Integrated Devices
3£®10 Fundamental Limits of Integrated Devices
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Chapter 4 Integrated Circuits
4£®1 Introduction
4£®2 Design Analysis and Simulation
4£®3 Vedficafion
4£®4 Summary
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Chapter 5 Microelectromechanical Systems(MEM)
5£®1 Introduction
5£®2 MEMS
5£®3 Mechanical Characteristics of Silicon
5£®4 Microfabrications for MEMS
5£®5 Micmsensing for MEMS
5£®6 Electromechanical Actuation
5£®7 Materials for MEMS
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Chapter 6 Examples of Scientific and Technological Papers
6£®1 The Challenges for Physical Limitations in si Microelectronics
6£®2 Micmelectronics and Photonics¡ªthe Future
6£®3 Accelerated Verification of Digital Devices Using VHDL
6£®4 What Is Nanotechnology
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